ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps.
Our oil-free scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps.
They are highlyvalued by customers who need clean, high quality vacuum, especially in analytical and semiconductor related fields.
ISP series of vacuum pumps offers a clean vacuum environment and eliminates the nuisance of cumbersome lubricant maintenance or sealing water administration.
ISP is free from installation restrictions because of its air-cooling system.
ISP mantains low power consumption from atm. to maximum pressure.Maximum pressure is 1[Pa]
High reliability against atm.
1 - Sputtering, Vacuum deposition, Ion plating
2 - Accelerator, Synchrotron Radiation
3 - Surface modification, Electron beam process
4 - Gas recovery devices
5 - Vacuum equipment
6 - Leak detectors
7 - Device handling system
8 - Vacuum furnaces, Heat treatment furnaces
9 - Laboratory uses
10 -Vacuum packing machine